
Resonant Frequency of Silicon Bridge under Radiation
Liu Yueming, Liu Junhua, Zhu Changchun
(Xi'an Jiaotong University,Xi'an 710049,China)
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Abstract: A
theoretical model is developed for calculating the frequency of the silicon bridge under
radiation. Use are made of the heat conducting theory, the thermal strain theory and the
mechanical vibration theory. The model is verified by comparison with the experimental
data.
Keywords: silicon resonant
bridge;radiation;resonant frequency; theoretical model