t209.gif (2877 ×Ö½Ú)
Thin Film of Surface Acoustic Wave Sensor for Sulfur Dioxi de Gas
Wei Peiyong,Zhu Changchun,Liu Junhua
(Xi'an Jiaotong University, Xi'an 710049, China)
retue.gif (1614 ×Ö½Ú)zwb.gif (1647 ×Ö½Ú)
Abstract: PAn(polyaniline) thin film of surface acoustic wave (SAW) gas sensors was studied experimently and theoretically to explain the relations between frequency shift and sulfur dioxide concentration.Several formulas were derived using the double energy valley model to explain the critical dot of curve of frequency shift vs. sulfur dioxide gasconcentration.Theory and experiment were provided to support the application of polyaniline thin film of SAW sensors. A polyaniline thin film was compared with a CdS thin film. The required characteristics of thin films for sulfur dioxide gas were obtained.
Keywords: surface acoustic wave sensor;polyaniline;thin film; CdSª«