Decomposition and Simplification of Scheduling Modeln for Manufacturing Semiconductors
Wei Junhu,Guan Xiaohong,Sun Guoji,Hu Baosheng
(Xi'an Jiaotong  University, Xi'an 710049, China)

Abstract: A scheduling model, with the objective of minimizing the average WIP (Work In Process) level, is built based on the fluid network model of semiconductor manufacturing systems. Taking advantage of the characteristic of decomposition, the scheduling scheme is divided into a series of subareas with the same length. The original scheduling problem is then decomposed into subproblems on each subarea. The solution can be obtained by summing the solutions of the subproblems. The computational complexity of the algorithm is proportional to the scheduling scheme. Improvement in performance and efficiency are shown by an example.
Keywords: semiconductor manufacturing;simulation based scheduling;optimal scheduling