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Determination of Young's  Modulus and Internal Stress from  Natural Frequency of Micro Beam
Jiang Zhuangde£¬Lu Dejiang£¬Wang Xiaobin£¬Chen Wei
(Xi'an Jiaotong University,  Xi'an 710049,  China)
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Abstract:  Young's modulus and internal stress  of micro beams are determined from array of sensors made of silicic micro-cantilevers and optical fibers. Coupling of optical fibers is used to detect the transverse natural frequency of the silicic micro-cantilever. The method is effective for analyzing the mechanical property of microstructure.
Keywords: measure;MEMS;Young's modulus;internal stress;optical fiber