New Absorbing Layer for Infrared Thermal
Detector of Micromachine
Liang Jintao, Liu Junhua, Zhang Jinyong
(School of Electrical Engineering, Xi'an Jiaotong University, Xi'an 710049, China)
Abstract: Based on the theoretical model of new infrared (IR) thermal detector of
micro-mechanical cantilever, a new infrared absorbing layer- carbon nanometer tube is
investigated, where the tube is adopted to enhance efficiently the infrared absorbing
characteristic. The results show that carbon nanometer tube, as the absorbing layer of a
micro-mechanical cantilever, outperforms the traditional IR absorbing layers, and the
power resolution is increased by 10%.Furthermore, the micro-electro-mechanical system
sensor is compatible with integrated circuit technology and suitable to batch production
with a lower cost.
Keywords: infrared thermal detector; micromachine; carbon nanometer tube