Zhu Qiang1, Jiang Zhuangde1, Wang Hairong1, Zhao Zexiang2
(1. State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China;
2. Textile Engineering and Technology Center, Zhongyuan Institute of Technology, Zhengzhou 450007, China)
Abstract: The primary uncertain factors in the elastic modulus
measurement of microcomponent by microcantilever deflection are analyzed and the fuzzy
mathematic method is introduced to the evaluation process. The relevant parameters are
allowed to variate within a certain range, a new evaluation model is established based on
fuzzy sets, where the stiffness constant of microcantilever beam is acquired by linear
regression of the effective load-deflection curve with fuzzy weight, and the beam geometry
dimensions regarded as Gaussian fuzzy numbers are obtained from programming of equivalent
common sets by level-cuts concepts. The experiments of silicon (100) microcantilever beam
are conducted, and the elastic modulus is calculated in ranges of different confidence
levels, which is agreeable to the real situations. The qualitative uncertainties in the
measurement can be absorbed by the established model with fuzzy parameters, which implies
that the evaluated elastic modulus is more valuable for the practice.
Keywords: microcantilever deflection; microcomponent; elastic modulus; fuzzy model;
membership functions
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