Cheng Guangming,Shen Chuanliang,Yang Zhigang
(School of Mechanical Science and Engineering,Jilin University,Changchun 130025,¡¡China)
Abstract:A piezoelectric pre-stage driver of electro-hydraulic servo valve was presented by reason of the low frequency response of electromagnetic pre-stage driver. The new driver was driven by piezoelectric multilayer actuators. The displacement of piezoelectric multilayer actuator was amplified by the flexure hinges amplifier based on the principles of triangle amplification.The static and dynamic characteristics were tested on the prototype. The characteristics of good linearity, high resolution and high frequency were approved.The natural frequency reached 1.201 kHz using finite element analysis and the actual measurement result was 1 kHz.
Keywords:piezoelectric actuation;electro-hydraulic servo valve;pre-stage driver;triangle amplification