Zhao Jianping,Chen Hualing,Chen Lingli,Chen Tianning
(School of Mechanical Enginring,Xi'an Jiaotong University,Xi'an 710049,China)
Abstract:The static characteristic model of a electrostatic torsion micromirror is illustrated. On the basis of bending analysis of a microbeam due to the nolinear electrostatic force,a new nonlinear mathematical model of a torsion micromirror,which considers the coupling effect of torsion and bending,is presented.The pull-in voltages,pull-in angles and torsion angels of both models varying with the applied voltages are compared with experimental results.It shows that the coupling model presented agrees with the testing results better than the uncoupling model,and the vertical deflection of the micromirror and width of a microbeam affect the static characteristics of a micromirror significantly.The coupling model is helpful to design and optimization of the mircromirror system.
Keywords:torsion micromirror;microelectromechanical sysem;coupling static characteristics
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