第36卷  第8期 西 安 交 通 大 学 学 报 Vol.36 No8
2002年8月

Journal of Xi'an Jiaotong Universtity

Aug. 2002

Preparation of Silica Films from Tetraethyl Orthosilicate
Sol-Gel Process Catalyzed with Acid
Yin Mingzhi,Yao Xi,Li Zhenrong ,Zhang Liangying
(Electrenic Materials Research Laboratory,Xi'an Jiaotong Univercity 710049,China)
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Abstract:To refrain from cracking of the silica film prepared by tetraethyl orthosilicate (TEOS) sol-gel catalyzed with acid, a new process based on two-step hydrolysis procedure of TEOS with organic additives (glycerol and poly vinyl alcohol) is presented. A granular-polymeric silica sol is made by the process. The glycerol controls the hydrolytic intermediate and silica aggregating, while the poly (vinyl alcohol) (PVA) makes the colloidal silica sol with co-polymeric structure, which is easily filmed. The gel sillical films with a hetero structure restrains the cracking by plastic effect, while the thermal strain induces the silica films compacted. Crack free uniform silica films are fabricated, and the corresponding physical properties of these films are:refractive index 1543~1580,thermal conductivity 0~3W/(m·K).
Keywords:tetrathyl orthosilicate sol-gel technique;silica; film