| 第36卷 第8期 | 西 安 交 通 大 学 学 报 | Vol.36 No8 |
| 2002年8月 | Journal of Xi'an Jiaotong Universtity |
Aug. 2002 |
Preparation of Silica Films from Tetraethyl Orthosilicate
Sol-Gel Process Catalyzed with Acid
Yin Mingzhi,Yao Xi,Li Zhenrong ,Zhang Liangying
(Electrenic Materials Research Laboratory,Xi'an Jiaotong Univercity 710049,China)
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Abstract:To refrain from cracking of the silica film prepared by tetraethyl orthosilicate
(TEOS) sol-gel catalyzed with acid, a new process based on two-step hydrolysis procedure
of TEOS with organic additives (glycerol and poly vinyl alcohol) is presented. A
granular-polymeric silica sol is made by the process. The glycerol controls the hydrolytic
intermediate and silica aggregating, while the poly (vinyl alcohol) (PVA) makes the
colloidal silica sol with co-polymeric structure, which is easily filmed. The gel sillical
films with a hetero structure restrains the cracking by plastic effect, while the thermal
strain induces the silica films compacted. Crack free uniform silica films are fabricated,
and the corresponding physical properties of these films are:refractive index
1543~1580,thermal conductivity 0~3W/(m·K).
Keywords:tetrathyl orthosilicate sol-gel technique;silica; film