Temperature Distribution and Resonance Amplitude of Thermally Excited Micromechanical Beam Resonators
Han Jianqiang¹,Zhu Changchun¹,Liu Junhua¹,Zhang Shengliang¹,Duan Jie²
(1.School of Electronics and Information Engineering,Xi'an Jiaotong University,Xi'an 710049 China;2.The 11th Institute of CAST)

Abstract：The temperature distribution along thermally excited micromechanical beam (cantilever or bridge) resonators is derived analytically according to their characteristics and geometry. The amplitude of the time-variant temperature component is high near the excitation point, while is low in points far away from the excitation point. The resonance amplitude of thermally excited micromechanical bridge resonators is calculated based on thermal expansion theory. The length of the bridge resonator is obtained by the mode function other than treatment of the bridge as an arc in calculating. In addition, the influence of internal stress on the amplitude is considered in calculating.
Keywords：thermal excitation;micromechanical cantilever;micromechanical bridge;resonator;resonance amplitude